- 1 FEMTO-ST and SAMMI group activities - 2 Observer techniques - - PowerPoint PPT Presentation

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Talk 1: Observer techniques appied to the control of piezoelectric microactuators Micky RAKOTONDRABE, Cdric Clvy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besanon, France) - 1 FEMTO-ST and SAMMI group activities - 2

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1 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Talk 1: Observer techniques appied to the control of piezoelectric microactuators

  • 1 – FEMTO-ST and SAMMI group activities
  • 2 – Observer techniques applied to

piezocantilevers

  • 3 – Self sensing of piezocantilevers

Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France)

microPAdS - FP7-PEOPLE-2007-2-1-IEF

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2 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Talk 1: Observer techniques appied to the control of piezoelectric microactuators

  • 1 – FEMTO-ST and SAMMI group activities
  • 2 – Observer techniques applied to

piezocantilevers

  • 3 – Self sensing of piezocantilevers

Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France)

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3 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

About FEMTO-ST Institute …

The roots of our activity comes from Watchmakers industry in Besançon area & Automotive industry in Belfort area.

  • A wide range of technical competencies in

ENGINEERING SCIENCES

  • A MULTIDISCIPLINARY research institute
  • A high level MICROFABRICATION

TECHNOLOGY facility

  • A culture of INNOVATION : from basic research

to industrial partnership

. 500 staff people . 28 M€ annual overall budget including 10 M€ operational budget . About 250 running research contracts

Besançon Belfort

6 research departments 6 main application fields 1 microfabrication center

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4 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Research Departments

  • 13 %

13 % 13 % 13 % 15 % 15 % 15 % 15 % 24 % 24 % 24 % 24 % 19 % 19 % 19 % 19 % 9 % 9 % 9 % 9 % 20 % 20 % 20 % 20 %

!"#!"$%#&'$" % $"($(" )*'% $" &#"'+)'"#&,"$# ("&'"# *%% +%$, $*#% $#"% #(%$# $"#%)!-# $"$* '&".(*'$"# #+* "+*'$"# #+*)'#) + "+*%*%$')%+ )#!"#$$#)') !*%% ($#'$#$"# "#"#,#$% "#'$"#% "#'!( $#)'"#%%', * '$))%+$/$*+() "#)#%$"('$$# #%% "###(%$% ( $!*% "#%*%$'% "#0#'$" % )%("&% #$#%)$ #''($#% ##!$% !$# $"#% # "#!$% 1#!#$#%

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5 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

SAMMI Group

Automated Systems for Micromanipulation and Microassembly

  • General objectives (1)

– Create microrobots and microrobotic cells for flexible micromanipulation and microassembly

Because of the growing number of microproducts to assemble, efficient and reliable micromanipulation systems are required Micro-assembly

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6 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

SAMMI Group

Automated Systems for Micromanipulation and Microassembly

  • General objectives (2)

– Control complex microsystems

MEMS = specific paradigms for control science

Microgripper from Femto-tools (FT G100) Nanotweezer from LIMMS

1 mm

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SLIDE 7

Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

SAMMI Group

Automated Systems for Micromanipulation and Microassembly Modelling and control of:

  • micro-actuators: SMA, MSMA, piezo, thermal…
  • microrobots: stick slip actuation, digital MEMS,…
  • discrete distributed systems: smart surface
  • continuous distributed systems
  • assembly microfactories: calibration, information data modelling and

management Main addressed scientific issues on control in the SAMMI group/ FEMTO-ST

Need of measurement (sensors, observers)

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SLIDE 8

8 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Talk 1: Observer techniques appied to the control of piezoelectric microactuators

  • 1 – FEMTO-ST and SAMMI group activities
  • 2 – Observer techniques applied to

piezocantilevers

  • 3 – Self sensing of piezocantilevers

Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France)

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9 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

  • Position control of one cantilever,
  • Force control of the second cantilever

A - Context

2 – Observer techniques applied to piezocantilevers

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SLIDE 10

10 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Manipulation force:

  • Modeling,
  • Control,
  • Measurement/estimation

d

+

  • Force

Deflection:

  • Modeling,
  • Control,
  • Measurement/estimation

A - Context

Maniplation Force

2 – Observer techniques applied to piezocantilevers

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SLIDE 11

11 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

B - Deflection measurement and control

d Disturbance:

  • force, temperature variation,…
  • nonlinearity, uncertainty

U d

piezocantilever reference

controller

[CASE07] [IROS07] [ieeeTCST09]

  • Frequential controller (H-inf, PID, RST…)

2 – Observer techniques applied to piezocantilevers

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12 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

B - Deflection measurement and control

d Disturbance:

  • force, temperature variation,…
  • nonlinearity, uncertainty

U d

piezocantilever

[Haddab, PhD00]

  • State-Space domain (LQ, modal control, pole assignment)

( )

ˆ ˆ ˆ

  • dX

AX BU K d d dt = + + −

reference

controller Luenberger/ Kalman Observer Estimate state ˆ

X

2 – Observer techniques applied to piezocantilevers

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SLIDE 13

13 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 reference

controller

[ifacWC08] [ieeeTASEa]

Linearization of the nonlinearity (hysteresis and creep)

B - Deflection measurement and control

d

U

Disturbance:

  • force, temperature variation,…
  • strongly nonlinearity, uncertainty

d

piezocantilever compensator

2 – Observer techniques applied to piezocantilevers

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SLIDE 14

14 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

C - Force measurement and control

d

+

  • F

Information on the force: from the deflection

2 – Observer techniques applied to piezocantilevers

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SLIDE 15

15 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

C - Force measurement and control

U

d d piezocantilever

F

reference

controller estimator ˆ F

2 – Observer techniques applied to piezocantilevers

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SLIDE 16

16 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

∫

A B C E

  • K

ˆ F

+ - +

ˆ d

U

d d piezocantilever

C - Force measurement and control

F

( )

1 1 d d d v a b v k U dt F F d d v F                 = +                                =          [Haddab, PhD00]

( )

( ) ( )

1 2 3

ˆ ˆ 1 ˆ ˆ ˆ ˆ ˆ ˆ ˆ ˆ 1 ˆ ˆ ˆ ˆ 1 ˆ d d K d v a b v k U K d d dt K F F d d v F d F v F                       = + + −                                         =                 =         

Luenberger state observer

  • Do not account nonlinearities

(hysteresis and creep)

  • Needs to impose dynamics

2 – Observer techniques applied to piezocantilevers

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17 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

U

d d piezocantilever

C - Force measurement and control

F

[AIM07]

Open-loop estimation

( )

( ) ( ) ( )

r p

d U D s C s U s D s F = Γ ⋅ + ⋅ + ⋅ ⋅

( )

1 ˆ ( ) ( ) ( )

r p

F d U D s C s U s D s = − Γ ⋅ + ⋅     ⋅

  • Do not account uncertainties
  • Direct inversion of dynamics

2 – Observer techniques applied to piezocantilevers

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18 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

C - Force measurement and control

U

d d piezocantilever

F

[ICRA09]

Unknown Input Observer (UIO) ( )

, dX A X u d B F dt d C X  = ⋅ + Γ + ⋅    = ⋅ 

( )

( )

ˆ ˆ ˆ ˆ , . ˆ ˆ dX AX u d B F K d d dt d CX  = + Γ + + −    = 

( )

1 2 1 2 3

ˆ ˆ ˆ , dd dX F F d F G X G G u d dt dt = + + + + Γ

force estimator

ˆ F

ˆ X

state estimator

F

2 – Observer techniques applied to piezocantilevers

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19 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

  • Accurate and high bandwidth sensors (optical sensors…):

expensive large sizes (not convenient for packaged systems)

D – Limitation of using sensors

2 – Observer techniques applied to piezocantilevers

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20 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

  • Embeddable sensors (strain gauge sensors):

noisy fragile

[Haddab et al, IFAC-Mech09]

D – Limitation of using sensors

2 – Observer techniques applied to piezocantilevers

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21 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Talk 1: Observer techniques appied to the control of piezoelectric microactuators

  • 1 – FEMTO-ST and SAMMI group activities
  • 2 – Observer techniques applied to

piezocantilevers

  • 3 – Self sensing of piezocantilevers

Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France)

3.1 Quasi-static free displacement self-sensing 3.2 Dynamic displacement self-sensing 3.3 Combined Force / displacement self-sensing

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22 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

  • 3. Self-Sensing of Piezoelectric Actuators

3.1 Quasi-static free displacement self-sensing

in P ext in ext

V C F h V Lw F h L s e Q + = = + − = β ε33

2 2 11 31

4 3

=

ext

F ≠

ext

F

2 1dx

dx Q

A

∫∫

= σ

αδ δ ε ε = =         + =

S E

s d L d wh Q

33 11 2 31 31 33

4 1 3 4

→ Free displacement → Force/Displacement

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23 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Sensorless method Observer may be further used in a closed loop control

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24 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Electronic circuits

Pang, 2006 Dosch, 1992 Cui, 2006

Current integrators.

Direct charge conv. Resistive divider Impedance (dynamic)

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25 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

∫ ∫

− − − + − − = dt t i dt t V R V C t V Q V C

BIAS in FP in R in DA

  • ut

est

) ( 1 ) ( 1 ) , ( α α α α α δ

∫ ∫

− − − + − = dt t i C dt R t V C C Q V C C V

BIAS FP in DA in R

  • ut

) ( 1 ) ( 1 αδ

αδ + − =

in RV

C Q

Quasi-static free displacement self-sensing OBSERVER

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26 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Identification des parametres Self-Sensing

Connus: C et CR Inconnus: α, iBIAS, RFP et QDA

Etapes:

1) Courant polarisation iBIAS : Vin=0 → taux de variation Vout 2) Resistance de fuite RFP: echelon Vin≠0 → derive Vout apres >1000 s. 3) Coeff. de deplacement α [C/m]: echelon Vin ou signal sinusoidal →

Fext=0

δ α / ) (

in R

  • ut

V C CV + − =

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27 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Identification parametres Self-Sensing - suite

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28 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Identification parametres Self-Sensing - suite

4) Absorption dielectrique QDA identification fonction de transfer de premier ordre. →

) ( ) ( ) (

*

s V s Q s

in DA est

= ∆δ δ δ δ − = ∆

est est

1 ) ( ) (

* *

+ = = s k s Q s Q

s DA DA

τ α

α /

* s s

k k =

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SLIDE 29

29 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Resultats Self-Sensing en deplacement

Matlab Simulink: alpha=-10.05e-9; C=47e-9; Cr=8.2e-9; Rfp=0.435e12; ibias=-1.7e-12; tau=57; ks=3.02e8;

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30 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Resultats Self-Sensing en deplacement

sans compensation erreur 2.75 µ µ µ µm compensation RFP erreur 1.05 µ µ µ µm compensation RFP et QDA : erreur 0.38 µ µ µ µm

0.55%

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31 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Noise measurement 16.7 nm (RMS) Keyence 2 nm (RMS) self-sensing (temperature isolated) 0.55 nm (RMS) SIOS

Resultats Self-Sensing en deplacement

Laser Interferometer (SIOS) self-sensing self-sensing Triangulation laser sensor (Keyence)

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SLIDE 32

32 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010 Resultats Self-Sensing en deplacement

Unimorph cantilever Bimorph cantilever ~1µm/0C ~0.2µm/0C

Self-sensing Error due to ambient temperature variations

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33 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Static (low frequency) Self Sensing and required dynamic self-sensing intended to superpose real (externally measured) displacement.

  • 3. Self-Sensing of Piezoelectric Actuators

3.2 Dynamic displacement self-sensing

Principle scheme of the dynamic self-sensing technique.

Figure 5. Bloc-scheme of the dynamic part of the estimator.

Dynamic Estimator – Reverse Multiplivcative form

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34 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Result with static self-sensing (step input of 20V). Result with dynamic self-sensing.

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35 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Step response of the closed-loop system. Settling time : 30 ms Dynamic error: 5% Complete short and long term response

  • f the closed-loop system.
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SLIDE 36

36 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

Force and displacement observation Hysteresis Model a) The play

  • perator; b) Prandtl-Ishlinskii (PI)

hysteresis model.

4 1 3 2 2 3 1 4 4 1 3 2 2 3 1 4

) ( ) ( ) ( b s b s b s b s a s a s a s a s a s V s V s F

in creep C

+ + + + + + + + = =

Creep TF Model

  • 3. Self-Sensing of Piezoelectric Actuators

3.3 Combined Force / Displacement self-sensing

1 ( ) 1 1 1 ( ) ( ) ( )

R est

  • ut

in in FP BIAS C in H in

C C F V V V t dt R i t dt F s V F s V β β β β β β = − + − − − ⋅ − ⋅

∫ ∫

Z est est free est

k F /

_

− = δ δ

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SLIDE 37

37 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

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SLIDE 38

38 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

.a) Measured and estimated force. b) Absolute error (force). a) Applied input signal b) Measured and estimated tip displacement. c) Absolute error (displacement)

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SLIDE 39

39 Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010

THANK YOU!

  • 1 – FEMTO-ST and SAMMI group activities
  • 2 – Observer techniques applied to

piezocantilevers

  • 3 – Self sensing of piezocantilevers