The Opportunities and Challenges of Waste-Recycling for - - PowerPoint PPT Presentation

The Opportunities and Challenges of Waste-Recycling for Semiconductor Plants

Arthur Chuang

Senior Director, 300mm Fabs Division, TSMC

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Overview of Industrial Waste Management in Science Parks

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Waste Management Flow and Treatment Overview

Waste Collection Waste Prevention and Minimization Waste Diversion through Recycle and Reuse Composting

• f Waste Fraction

Sanitary Landfilling Residual Landfill Anaerobic Digestion

• f Waste Fractions

Incineration and Other Thermal Processes

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Domestic Waste Overview of Taiwan

• In 2014, domestic waste was 26,250 kiloton in Taiwan, in which

municipal waste was 28% and enterprise waste was 72%.

• The waste-recycling rate of municipal waste was 56%, enterprise

waste was 81%, therefore the final disposed wastes are both around 3,000 kiloton.

Municipal waste

K ton/yr

3,885 3,944 4,025 4,034 4,097 4,073 3,611 3,379 3,300 3,273 48.8% 52.2% 54.4% 55.0% 55.6% 0.0% 10.0% 20.0% 30.0% 40.0% 50.0% 60.0%

• 1,000

2,000 3,000 4,000 5,000 6,000 7,000 8,000 9,000 10,000 2,010 2,011 2,012 2,013 2,014 recycle non-recycle 14,580 15,440 14,510 14,910 15,290 3,510 3,290 3,440 3,760 3,590 80.6% 82.4% 80.8% 79.9% 81.0% 0.0% 10.0% 20.0% 30.0% 40.0% 50.0% 60.0% 70.0% 80.0% 90.0% 100.0%

• 5,000

10,000 15,000 20,000 25,000 2,010 2,011 2,012 2,013 2,014 recycle non-recycle recycling rate

Enterprise waste

K ton/yr Data source: EPA 2014 Waste-Recycling Annual Report

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5,312 3,327 1,150 712 672 557 376 297 260 238 28% 46% 52% 56% 59% 62% 64% 66% 67% 68% 0% 10% 20% 30% 40% 50% 60% 70% 80% 90% 100%

• 1,000

2,000 3,000 4,000 5,000 6,000 7,000 8,000 Declaration Cumulative Percentage

Industrial Waste Overview of Taiwan

• According to the EPA, total enterprise waste weighed 18,880

kilotons in 2014, in which 88% was industrial waste.

• The highest industrial waste was slag from steel industry (28%),

and the waste from electronics was 670 kilotons (3.5%).

Data source: EPA 2014 Waste-Recycling Annual Report

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Electronic Waste Overview of Science Parks

• In 2014, Science Parks generated 630 kilotons of industrial

waste, which was 3.3% of total enterprise waste. Obviously 88%

• f them was originated from semiconductor and optoelectronics

manufacturing.

• The waste-recycling rate of optoelectronics was about 80%, and

semiconductor manufacturing was about 92% in recent years.

75.9% 79.9% 92% 90% 91.7% 81.0% 85.1% 84% 84% 82.0% 70.0% 75.0% 80.0% 85.0% 90.0% 95.0% 100.0% 2010 2011 2012 2013 2014 Semiconductor Optoelectronic

Waste-Recycling Rate

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Typical Wastes from a Semiconductor Plant

• In Taiwan, semiconductor manufacturing generated 310 kilotons

wastes in 2014.

• The major wastes coming from semiconductor manufacturing

are acid (43%), solvent (25%) and sludge (18%).

Data source: EPA, Industrial Waste Report and Management System

Electronic Industry

192.4 200.9 215.8 239.7 309.8 137.4 130.9 116.6 141.7 142.6 104.3 103.1 139.6 144.6 175.4 31.8 32.0 32.8 34.9 44.1

• 100.0

200.0 300.0 400.0 500.0 600.0 700.0 800.0 2010 2011 2012 2013 2014 Semiconductor Panel Optoelectronic Packaging

K ton/yr

%

132 51 30 30 24 9 7 4 43% 59% 69% 78% 86% 89% 92% 93%

0% 10% 20% 30% 40% 50% 60% 70% 80% 90% 100%

• 20

40 60 80 100 120 140 160

Qty Cumulative proportion

Semiconductor Manufacture

K ton/yr %

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Category Volume

Recycled Products Sell/Pay Status H2SO4, H3PO4, HF 51% Industrial H2SO4 6% Sell 94% Pay Thinner, IPA, NMP 14% Industrial Solvent 100% Sell (NH4)2SO4, TMAH 12% (NH4)2SO4, NH4OH, /TMAH 21% Sell 79% Pay CaF2 Sludge 8% Cement Pay SiO2 Sludge 5% Cement Pay CuSO4 4% Cu/CuSO4 Sell/Pay Waste Plastic Mixtures 2% Plastic Barrel Sell Active Carbon, Non-Toxic Waste Chemical, Waste Wiper…etc. 4% Incineration or Landfill Pay TOTAL 100% Recycling Rate 95% ~20% Sell ~80% Pay

Typical Waste from a Semiconductor Plant

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Waste Treatment Industry of Taiwan

 Supported by governmental policy with complete and compulsory regulations.  Government monitor treatment facility and loading ratio, therefore, to prevent insufficient treatment capacity.  Wastes sources are stable and sufficient.

Str

tren engt gth

 Society distrust waste-treatment industry. The recycled products has not yet been accepted by consumers, the market is still restricted.  The waste treatment process involves several companies in loop and increases possibility of abuses.  It is difficult to build a new treatment plant. Once the plants are full loaded, wastes can no longer be treated.

Thr

hrea eats ts

 It is difficult to trace the reuse status for recycled products.  The authorities are dispersed in 10 different administrations such as MOEA and so on.  The penalty of Waste Clearance Regulation is relatively loose than other environmental regulations.

Wea

eakn kness ess

 Due to the raise of environmental awareness in

• Taiwan. The enterprises are more willing to

invest and develop technologies for waste treatment and recycling.  To improve waste value through a refined classification and pretreatment at the sources.  To improve industry’s premium and credibility

• f environmental protection.

Opp

ppor

• rtu

tunities nities

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Status of the Polluted Sites under EPA’s Observation

• According to the EPA, there 19 illegal dumping sites are polluted

and controlled for recovery. The major illegal wastes include sludge, slags and waste liquid.

• Based on pollution area, 76% of the affected area is polluted by

heavy metal (mercury, nickel, cadmium, chromium, copper, zinc, lead) and the other 24% is organic solvent (benzene, phenol).

8.8 8.2 0.0 5.4 0.0 5.0 10.0 15.0 Soil groundwater hectare (ha) metal solvent Data source: EPA, Environment Resource Database

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Establish Waste-Recycling Value Chain in Semiconductor Plants

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Waste Management Hierarchy

• Recycling is processing used materials into

new, useful products. This is done to reduce the consumption of raw materials that would have been used.

• Recycling also uses less energy and great

method of controlling air, water and soil pollution.

VALUE

Buy Recycled Waste Economics

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Waste Management Process

• Start from… identifying and quantifying your waste. Organize a

waste management team to drive things forward.

• Generate an waste reducing action plan. Get commitment from

senior management for the action plan.

• Identify the possible disposal options if the waste is
• unrecyclable. Select your waste carriers carefully and make sure

that your Duty of Care responsibilities are met.

• Monitor and review your achievements. Communicate your

success to interested stakeholders outside your organization.

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Recycling – Transform the Value of Waste from Negative to Positive

• After a proper converting process, to raise the quality and price

value of recycled waste and to compete with new product.

• In Taiwan, Nearly 60% of industries depend on recycling industry to

provide partial raw materials to balance cost with imported

• materials. The annual production of recycling industry is growing

doubly in the last decade and reached NT$ 67.8 billion in 2015.

• The steel slags, furnace dust, solvent and metal contribute the

most to the production amount.

38.5 42 48.2 48.7 54.4 65.8 65.8 65.9 67 67.8 30 35 40 45 50 55 60 65 70 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 billion

Data source: IDB, Industrial Waste Clearance, Treatment and Recycling information net

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Innovation on Waste Recovery

• Since the waste generated by each company is unique, therefore

it is necessary to have professional teams for recycling. Brainstorm to generate ideas and creative methods of waste

• recovering. Only a long-term commitment can increase profits

through reducing waste.

• Generally speaking, the first priority of waste-recycling tasks is

to analyze the ingredients of the wastes, to investigate a proper classification method for simplifying the complexity of the waste and to manage the waste according to the recycling structure.

• One of the best strategies is to treat the waste with waste, to

transform it into a useful or valuable material.

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Waste Sulfuric Acid Recycling – Electronic Grade

Information source: AUECC (a Linde/LienHua Company)

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Waste Sulfuric Acid and Ammonia Nitrogen Recycling – Industrial Grade

Information source: TSMC

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On-Site Chemical Recycling Facility – TMAH

Information source: TSMC

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On-Site Electroplating Facility – Copper Sulfate

Information source: TSMC

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Artificial Fluorite Sintering Facility – Calcium Fluoride

Information source: CHC Resources (a China Steel Company)

21 Category Volume Recycled Product (Present) Sell/Pay Status Recycled Product (Future) Sell/Pay (Future) H2SO4, H3PO4, HF 51% Industrial H2SO4 6% Sell 94% Pay EL grade H2SO4, Na3PO4/CaF2 100% Sell Thinner, IPA, NMP 14% Industrial Solvent 100% Sell Industrial Solvent 100% Sell (NH4)2SO4, TMAH 12% (NH4)2SO4/TMAH 21% Sell 79% Pay (NH4)2SO4, NH4OH, /TMAH 87.5% Sell 12.5% Pay CaF2 Sludge 8% Cement Pay Fluorite (85% CaF2) 100% Sell SiO2 Sludge 5% Cement Pay Cement Pay CuSO4 4% Cu CuSO4 Sell/Pay Copper Sell Waste Plastic Mixtures 2% Plastic Barrel Sell Plastic Pellets Sell Active Carbon, Non-Toxic Waste Chemical, Waste Wiper…etc. 4% Incineration or Landfill Pay Incineration or Landfill Pay TOTAL 100%

Recycling Rate 95% ~20% Sell ~80% Pay 85% Sell 15% Pay

Sustainable Waste-Recycling Index – Sales Rate

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Opportunities and Challenges to Connect the Future

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Be a Reputable, Licensed, Specialist Company

• A professional, responsible and sustainable waste treatment

industry is essential to success of waste treatment.

• In terms of reliability and credibility, the state-owned treatment
• rganizations are currently much better than private ones, the

differences of their performance are probably due to their different business and financial models.

• The waste treatment industry should establish a transparent

management mechanism and information platform, such as

– an open and public logistic information and trading process. – audit or verification guidelines ensure the sustainable industry.

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Governance on Waste Management

• If the government is not capable to conduct the waste treatment

enterprises, they should consider to transform the industry into state-owned enterprises (monopolistic sale) in order to protect the environment.

• Profits Guarantee: Set a minimum treatment price to avoid price
• competition. It can assure that the treatment plants gain fair

profits, therefore they should be responsible of the legality.

• Responsibility Guarantee: Evaluate the performance of each

treatment plant periodically . There should be a disqualification mechanism to assure the quality of treatment plants.

• Administrative Assistance: Amend the regulations to authorize

enterprises selling their recycled wastes (B2B), so that the enterprises may dedicate to waste-recycling business.

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Optimize Waste Management Program

• The first strategy of waste management is reduction, as well as
• prevention. The second is reuse, the last is recycling. Therefore

reducing the usage from the source is the core value of the waste management.

• Bring waste treatment program to senior management level, which

means to optimize the program through top-down management, is the opportunity to eliminate waste from the source i.e. reduction or prevention stage.

• Recycling and reuse can be as effective as possible only if the

traditional logistic management is transformed. Facility should be requested to take more responsibility of waste reduction program and to dedicate into the new technology development .

• Encourage the suppliers to commit to waste-recycling, help the

development of waste-recycling supply chain.

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Recycle Your Business Waste by Yourself

• The more refined categories of wastes, the easier of recycling

process and higher of recycling rate. One of the most important strategies of waste recycling is to recycle one’s own waste, so that the complexity and the process of waste recycling can be simplified.

• Designing an on-site recycling can reduce the risk of outbound
• transportation. When the outbound transportation is eliminated,

not only the transportation can be relieved, but also the risk of illegal dumping waste can be avoided.

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Summary

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The Opportunities and Challenges of Waste- Recycling for Semiconductor Plants

• Treat the waste locally and avoid long distance transportation. It

is suggested that the government include the treatment plants into industrial park or regional management system.

• Integrate the waste treatment plants to achieve better economic

and technical scopes, so that the profits can be ensured and legal operation can be achieved.

• The waste treatment industry should assure profitability and

prohibit the price competition. The logistic operation should be transparent, be watched by the society.

• High-tech industry can help to establish structured industrial

chains of waste recycling and final disposal. It is suggested that the government assist and use this industrial chain to improve the waste recycling performance of general industrial area.

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The Opportunities and Challenges of Waste- Recycling for Semiconductor Plants

• Same as green manufacturing and quality improvement

program, each corporation should monitor the waste reduction

• utcome of their supply chains and encourage them to develop

the waste recycling techniques and business innovation.

• Facility organizations should invest their resources, take the

responsibility to solve the waste issues and to reduce operating cost through waste-recycling.

• Waste recycled as raw-materials (cradle to cradle) is happening

now, it deserves effort for the enterprises to evaluate and to consider their commitments to the waste recycling.

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Thank You